| Identification |
| Name: | Tetramethyl ammoniumhydroxid pentahydrate |
| Synonyms: | Tetramethylammonium hydroxide pentahydrate |
| CAS: | 10424-65-4 |
| EINECS: | 200-882-9 |
| Molecular Formula: | C4H13NO?5(H2O) |
| Molecular Weight: | 181.23 |
| InChI: | InChI=1/C4H12N.6H2O/c1-5(2,3)4;;;;;;/h1-4H3;6*1H2/q+1;;;;;;/p-1 |
| Molecular Structure: |
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| Properties |
| Transport: | UN 1759/3423 |
| Flash Point: | °C |
| Boiling Point: | °Cat760mmHg |
| Density: | g/cm3 |
| Stability: | Stable. Incompatible with strong oxidizing agents, strong acids. |
| Water Solubility: | soluble |
| Solubility: | soluble in water |
| Appearance: | Colorless needlelike crystals |
| Packinggroup: | II |
| Flash Point: | °C |
| Storage Temperature: | 0-6°C |
| Sensitive: | Air Sensitive & Hygroscopic |
| Usage: | An anisotropic etchant of silicon. Also used as a basic solvent in the development of acidic photoresist in the photolithography process. |
| Safety Data |
| Hazard Symbols |
T:Toxic
C:Corrosive
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