| [Fire Fighting] Do not extinguish fire unless flow can be stopped. Use water in flooding quantities as fog. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible. Solid streams of water may be ineffective. Use alcohol foam, dry chemical or carbon dioxide. | |
| [Upper exp. limit] 36 | |
| [Lower exp. limit] 6.7 | |
| [Fire Potential] May burn but does not ignite readily. | |
| [Ingestion] Seek medical assistance. | |
| [Inhalation] Move victim to fresh air. Apply artificial respiration if victim is not breathing. Do not use mouth-to-mouth method if victim ingested or inhaled the substance; induce artificial respiration with the aid of a pocket mask equipped with a one-way valve or other proper respiratory medical device. Administer oxygen if breathing is difficult. | |
| [Skin] Remove and isolate contaminated clothing and shoes. Immediately flush with running water for at least 20 minutes. For minor skin contact, avoid spreading material on unaffected skin. | |
| [Eyes] Immediately flush with running water for at least 20 minutes. | |
| [Storage] Keep in a cool, dry, dark location in a tightly sealed container or cylinder. Keep away from incompatible materials, ignition sources and untrained individuals. Secure and label area. Protect containers/cylinders from physical damage. | |
| [Handling] All chemicals should be considered hazardous. Avoid direct physical contact. Use appropriate, approved safety equipment. Untrained individuals should not handle this chemical or its container. Handling should occur in a chemical fume hood. | |
| [Ingestion] See Inhalation. | |
| [Inhalation] TOXIC; inhalation, ingestion, or skin contact with material may cause severe injury or death. Effects of contact or inhalation may be delayed. | |
| [Skin] Contact with molten substance may cause severe burns to skin and eyes. See Inhalation. | |
| [Eyes] See Inhalation. | |
| [Hazards] When heated, vapors may form explosive mixtures with air: indoors, outdoors, and sewers explosion hazards. May polymerize explosively when heated or involved in a fire. Contact with metals may evolve flammable hydrogen gas. Containers may explode when heated. Runoff may pollute waterways. Substance may be transported in a molten form. | |
| [EC Risk Phrase] R 10 23/25 35 51 | |
| [EC Safety Phrase] S 7 26 36/37/39 45 | |
| [UN (DOT)] 1835 | |
| [Personal Protection] Wear appropriate protective gloves, clothing and goggles. | |
| [Respirators] Wear positive pressure self-contained breathing apparatus (SCBA). | |
| [Appearance] Tetramethylammonium hydroxide is a solid in the hydrated form or a colorless liquid with a strong ammonia-like odor. | |
| [Solubility in water] Miscible | |
| [Vapor Pressure] 18 (25 C) | |
| [Density] 1.016 g/cm3 (25 C) | |
| [Usage] Used as a basic solvent in the development of acidic photoresist in the photolithography process. | |
| [Vapor Density] 6.3 | |
| [Refractive Index] 1.38 (20 C) | |
| [Product Name] Tetramethylammonium hydroxide | |
| [Synonyms] N,N,N-Trimethylmethanaminium hydroxide Tetramethylazanium hydroxide TMAH | |
| [CAS] "CASEN_75-59-2.htm">75-59-2 | |
| [Formula] C4H13NO | |
| [Molecular Weight] 91.15 | |
| [EINECS] 200-882-9 | |
| [RTECS] PA0875000 | |
| [RTECS Class] Other | |
| [Merck] 12,9363 | |
| [Beilstein/Gmelin] 3558708 | |
| [Beilstein Reference] 4-04-00-00145 | |
| [Small spills/leaks] Keep sparks, flames, and other sources of ignition away. Keep material out of water sources and sewers. Build dikes to contain flow as necessary. | |
| [Incompatibilities] Avoid contact with strong acids and oxidizing agents. Attacks many plastics and rubber. May react with metallic aluminum and generate hydrogen gas. | |
| [Stability] No data. | |
| [Decomposition] Above the flash point, explosive vapor-air mixtures may be formed. | |
| [Combustion Products] Fire may produce irritating, corrosive and/or toxic gases. | |
| [UN Number] 1835 | |
| [Hazard Class] 8 | |
| [Packing Group] II |
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